Maryland's Defense Patent Database

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Chemical mapping using thermal microscopy at the micro and nano scales

Patent image
NRL

A non-destructive method for chemical imaging with ˜1 nm to 10 μm spatial resolution (depending on the type of heat source) without sample preparation and in a non-contact manner. In one embodiment, a sample undergoes photo-thermal heating using an IR laser and the resulting increase in thermal emissions is measured with either an IR detector or a laser probe having a visible laser reflected from the sample. In another embodiment, the infrared laser is replaced with a focused electron or ion source while the thermal emission is collected in the same manner as with the infrared heating. The achievable spatial resolution of this embodiment is in the 1-50 nm range.

Inventors: 
Furstenberg, Robert; Kendziora, Chris; Bassim, Nabil D.; Mcgill, Robert Andrew; Nguyen, Viet K.
Patent Number: 
Technical domain: 
Sensors and Measurement
FIle Date: 
2012-11-25
Grant Date: 
2015-07-28
Grant time: 
975 days
Grant time percentile rank: 
17
Claim count percentile rank: 
7
Citations percentile rank: 
1
'Cited by' percentile rank: 
1
Assignee: 
US NAVY