Gray-tone lithography using optical diffusers
NRL
A method of: directing an exposing light through an optical diffuser; directing the diffused light though a photomask having transparent areas corresponding to a gray-tone pattern; directing the masked light onto a photoresist material on a substrate; developing the photoresist to produce a three dimensional structure in the photoresist.
Inventors:
Christophersen, Marc; Phlips, Bernard
Patent Number:
Technical domain:
Optics
FIle Date:
2008-08-21
Grant Date:
2013-02-12
Grant time:
1,636 days
Grant time percentile rank:
30
Claim count percentile rank:
5
Citations percentile rank:
1
'Cited by' percentile rank:
1
Assignee:
US NAVY
