Shell type actuator
NRL
A micromechanical resonator is formed on a substrate. The resonator has a partial spherical shell clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may be used. Movement is induced in a selected portion of the disc, inducing easily detectible out-of-plane motion. A laser is used in one embodiment to heat the selected portion of the disc and induce the motion. The motion may be detected by capacitive or interferometric techniques.
Inventors:
Zalalutdinov, Maxim; Reichenbach, Robert B.; Aubin, Keith; Houston, Brian H.; Parpia, Jeevak M.; Craighead, Harold G.
Patent Number:
Technical domain:
Communications
FIle Date:
2006-02-20
Grant Date:
2010-10-12
Grant time:
1,695 days
Grant time percentile rank:
31
Claim count percentile rank:
8
Citations percentile rank:
1
'Cited by' percentile rank:
1
Assignee:
CORNELL UNIV
